,

Area-Selective Atomic Layer Deposition Assisted by Short-Chain Alkanethiols Self-Assembled Monolayers

,

Advanced Atomic Layer Deposition of Metal Oxide Films with Discrete Feeding Method

,

Point defect engineering of Bi0.4Sb1.6Te3 alloys for high thermoelectric performance

,

Enhanced Selectivity of Atomic Layer Deposited Ru Thin Films through the Discrete Feeding of Vapor-Phase Inhibitor

,

Atomic Level Patterning Process of SiO2 Thin Films for Advanced Nanoelectronics