,

N2H4를 이용한 저온 thermal ALD SiN 박막 공정

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High Li ion conductive Li-Al-O protection layer on Li metal anode for Li-ion secondary batteries via Atomic-layer-deposition

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Advanced ALD Processes ALD beyond semiconductor process; prospective applications aiming mass-production

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New class of field-effect transistor using two-dimensional electron gas in ALD Al2O3/TiO2 ultrathin (?10 nm) film heterostructure interface

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Advanced ALD processes: Electric field assisted ALD, discrete feeding method, and HCP enhanced ALD