,

Atomic-Layer-Deposited LiCoO2 and LiV2O5 Thin Film Cathodes on 3D Structure for High Power Density Micro-Batteries

,

Area-Selective Atomic Layer Deposition of Ru Thin Films Using a Vapor-Phase Surface Moderator

,

Investigation of Phases and Chemical States of Tin Titanate Films Grown by Atomic Layer Deposition

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Hollow cathode plasma source를 이용한 고품질 SiN ALD 공정

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Growth behavior and properties of Ru film by electric field/potential assisted atomic layer deposition (EA-ALD)