,

Various interface sulfur passivation for atomic-layer-deposited gate oxide film on III-V compound semiconductors

,

Surface Sulfur Passivation using H2S annealing for AlGaN/GaN Heterostructure-based Metal-Insulator-Semiconductor Devices

,

ALD : beyond semiconductor process

,

Electrical properties of SiO2 thin films grown by plasma-enhanced atomic layer deposition

,

Novel field-effect passivation for nanostructured Si