,

ALD SiO2 Gate Dielectric for 4H-SiC based MOS Devices (4H-SiC 기반 MOS 소자를 위한 ALD SiO2 게이트 절연막)

,

Degradation mechanism and enhancement solutions for field-effect passivation in nanostructured Si solar cells

,

Nitric Oxide Post-deposition Annealing of Atomic Layer Deposited SiO2 on 4H-SiC

,

원자층 증착법: 반도체 공정 그 이후

,

Different Temperature Dependence of H2O and O3 Reactivity and Residual Carbon Impurities in Atomic-Layer-Deposited Al2O3 film