Assessment and verification of thickness homogeneity in mask blank by utilizing main harmonics of triple-surface interferometry
Sungtae Kim, Yangjin Kim*, Naohiko Sugita, Mamoru Mitsuishi
Precision Engineering, 2024
12
Simultaneous interferometric profilometry of surface and thickness of transparent plate using wavelength modulation
Hwan Kim, Jurim Jeon, Sungtae Kim, Yangjin Kim*, Naohiko Sugita
Optik, 2023
13
Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning
Jurim Jeon, Yangjin Kim*, Naohiko Sugita
Journal of Mechanical Science and Technology, 2023
14
Surface topography of transparent plate using Fizeau interferometer with suppression of intensity modulation
Sungtae Kim, Yangjin Kim*, Naohiko Sugita, Mamoru Mitsuishi
International Journal of Precision Engineering and Manufacturing – Smart Technology, 2023
15
Design and assessment of phase-shifting algorithms in optical interferometer
Sungtae Kim, Jurim Jeon, Yangjin Kim*, Naohiko Sugita, Mamoru Mitsuishi
International Journal of Precision Engineering and Manufacturing – Green Technology, 2023
16
Surface assessment of transparent glass plate with wavelength-modulated interferometry and harmonic phase-iterative method
Sungtae Kim, Yangjin Kim*, Naohiko Sugita, Mamoru Mitsuishi
International Journal of Precision Engineering and Manufacturing – Smart Technology, 2023
17
Simultaneous thickness and surface profiling of blank mask and its experimental verification using robust harmonic fringe-iterative algorithm and Fizeau interferometer
Sungtae Kim, Yangjin Kim*, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi
Optics Communications, 2022
18
Interferometric thickness assessment of optical flat by combining iterative analysis and wavelength tuning
Sungtae Kim, Yangjin Kim*, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi
Optik, 2022
19
Fringe analysis for thickness estimation of optical glass plate using Fizeau interferometer
Jurim Jeon, Yangjin Kim*, Sungtae Kim, Kenichi Hibino, Naohiko Sugita
Optics Communications, 2022
20
External exposure specific analysis for radiation worker in reuse of containment building for Kori Unit 1
Jihyang Byon, Sangjune Park, Yangjin Kim, Seokyoung Ahn*