Error-compensating phase-shifting algorithm for surface shape measurement of transparent plate using wavelength-tuning Fizeau interferometer

Interferometric measurement of surface shape by wavelength tuning suppressing random intensity error

Canceling the momentum in a phase-shifting algorithm to eliminate spatially uniform errors

Measurement of highly reflective surface shape using wavelength tuning Fizeau interferometer and polynomial window function

Compensation for correlated error in multilayer interferometer

Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function

Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry

Surface measurement of indium tin oxide thin film by wavelength-tuning Fizeau interferometry

Measurement of absolute optical thickness of mask glass by wavelength tuning Fourier analysis

Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry