Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer

Multiple-surface interferometry of highly reflective wafer by wavelength tuning

Design of phase shifting algorithms: fringe contrast maximum

Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer

Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry

Quality enhancement of interferometric fringe pattern based on deep-learning-based denoising of combined noise

Glass thickness testing using Fizeau interferometer with suppression of environmental factors

ChatCNC: Conversational machine monitoring via large language model and real-time data retrieval augmented generation

3면 간섭계를 이용한 블랭크 마스크의 광학적 두께 변동 성분 분리 방법 개발

파장 주사 Fizeau 간섭계와 Gaussian 창함수를 이용한 실리콘 웨이퍼의 표면 형상 측정