Surface profilometry of silicon wafers using wavelength-tuned phase-shifting interferometry

Analysis of melt-pool behaviors during selective laser melting of AISI 304 stainless-steel composites

Interferometric profilometry of absolute optical thickness of transparent plate using wavelength tuning fringe analysis

Measurement of surface profile and thickness of multilayer wafer using wavelength-tuning fringe analysis

Interferometric profile measurement of optical-thickness by wavelength tuning with suppression of spatially uniform error

Statistical and interferometric determination of optical thickness of multilayer transparent plate

Precision interferometric surface metrology of transparent thin film using wavelength tuning

Simultaneous interferometric measurement of the absolute thickness and surface shape of a transparent plate using wavelength tuning Fourier analysis and phase shifting

Phase-shifting algorithm to suppress inner reflection in wavelength tuning Fizeau interferometer

Absolute interferometric test for high numerical-aperture spherical concave surfaces: gravitational effect