Scanning interferometric phase-calculation formula for simultaneous topographic profiling of thickness and surface of optical flats

Assessment and verification of thickness homogeneity in mask blank by utilizing main harmonics of triple-surface interferometry

Simultaneous interferometric profilometry of surface and thickness of transparent plate using wavelength-modulation

파장 주사 간섭법을 이용한 투명 평판의 초정밀 표면 형상 측정

Simultaneous thickness and surface profiling of blank mask and its experimental verification using robust harmonic fringe-iterative algorithm and Fizeau interferometer

Fringe analysis for thickness estimation of optical glass plate using Fizeau interferometer

Surface measurement of silicon wafer using harmonic phase-iterative analysis and wavelength-scanning Fizeau interferometer

Suppression of thermal deformation of machine tool spindle using TiC-Fe composite

Wavelength-tuning interferometry with suppression of dispersive error

Wavelength-tuning multiple-surface interferometric analysis with compression of Zernike piston phase error