,

C2F6/Ar 플라즈마를 이용한 IZO 박막의 건식 식각

,

HBr/Ar과 Cl2/Ar 플라즈마를 이용한 나노미터로 패턴된 Magnetic Tunnel Junction Stack의 건식 식각

,

Investigation on Etch Characteristics of Magnetic Tunnel Junction Stacks with Nanometer-Sized Patterns for Magnetic Random Access Memory

,

Inductively Coupled Plasma Reactive Ion Etching of ZnO in a HBr/Ar Plasma

,

Etch Characteristics of Nickel Oxide and Nickel Using Inductively Coupled Plasma Reactive Ion Etching for Oxide Resistive Random Access Memory(OxRRAM) Application