,

Inductively Coupled Plasma Reactive Ion Etching of GeSbTe Thin Films in a HBr/Ar Gas

,

High Density Plasma Etching of IrRu Thin Films as a New Electrode for FeRAM

,

FABRICATION OF MAGNETIC TUNNEL JUNCTION STACK USING HIGH DENSITY PLASMA ETCHING IN Cl2/Ar AND BCl3/Ar GASES

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Cl2/Ar 가스를 이용한 ZnO 박막의 유도 결합 플라즈마 반응성 이온 식각

,

Radio Frequency Reactive Magnetron Sputtering에 의해 증착된 Indium Zinc Oxide 박막의 전기적 특성과 광학적 특성