발행물

전체 논문

235

111

Study on Fence-Free Platinum Etching Using Chlorine-Based Gases in Inductively Coupled Plasma
10055870
Journal of the Electroche-mical Society - 직접입력, 199701

112

Etching Effects to PZT Capacitors with RuOx/Pt Electrode by using Inductively Coupled Plasma
10055870
Integrated Ferroelectrics - 직접입력, 199701

113

Integration of Ferroelectric Capacitors using Multilayered Electrode
10055870
Integrated Ferroelectrics - 직접입력, 199701

114

Fabrication and Comparison of Ferroelectric Capacitor Structures for Memory Applications
10055870
Integrated Ferroelectrics - 직접입력, 199701

115

Etching Effects on Ferroelectric Capacitors with Multilayered Electrodes
10055870
Japanese Journal of Applied Physics - 직접입력, 199701

116

Effects of Substrate Modification on the Growth and Characteristics of MOCVD PZT
10055870
Integrated Ferroelectrics - 직접입력, 199701

117

Effects of Oxide Electrode on PbZrXTi1-XO3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
10055870
Japanese Journal of Applied Physics - 직접입력, 199701

118

Study on Property Variation due to the Interface between PZT and Electrode
10055870
Integrated Ferroelectrics - 직접입력, 199601

119

Dry etching of Pt/Pb(ZrxTi1-x)O3/Pt Thin Film Capacitors in an Inductively Coupled Plasma(ICP)
10055870
Integrated Ferroelectrics - 직접입력, 199501

120

Reactive Cluster Beam Etching of Fine Patterns
10055870
Applied Physics Letters - 직접입력, 199301