발행물
컨퍼런스
The 11th International Meeting on Information Display
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A Study on the Prevention of the Filament Oxidation in Catalytic CVD System
Study of Catalytic Wire Arrangement Method for Low Temperature Thin Films Fabrication on Flexible Substrate at Low Temperatures (95oC~150oC) by Cat-CVD
219th ECS Meeting
The Hysteresis Characteristics of Low Temperature ({less than or equal to} 200 °) Silicon Nanocrystals Embedded in Silicon-Rich Silicon Nitride Films
Effect of Atomic Hydrogen in SiNx Films for Gate Dielectric of Silicon-Based TFTs Fabricated at a Low-Temperature (less than or equal to 150oC)
2011 Materials Research Society Spring Meeting
Annealing Effect of SiNx Films for Gate Dielectric of Silicon-Based TFTs Fabricated at a Low Temperature (<150oC) by Cat-CVD System