,

In-situ Hydrogen Annealing of Silicon Nitride Gate Dielectric Layers Prepared by Catalytic CVD for Minimizing Hysteresis

,

Electroluminescence Characteristics of Silicon Nanocrystals Embedded in Silicon Nitride Films Deposited at Low Temperature

,

Doubly Stacked Tunnel Barrier for Charge Storage Silicon Nanodots Embedded in a Silicon-rich Silicon Nitride

,

Formation of high density Si nanodots using sputtered silicon seeds for non-volatile memory applications

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"Effect of Filament Temperature, Processing Pressure and CH4 Gas on Silicon-Carbide Films at Low Temperatures by Cat-CVD"