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전체 논문

323

311

Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers
박진구
KOREAN JOURNAL OF METALS AND MATERIALS, 2013

312

Fabrication and Characterization of an Antistiction Layer by PECVD(plasma enhanced chemical vapor deposition) for Metal Stamp
10054377
Korean Journal of Materials Research - 직접입력, 2006

313

The Effect of Mechanical Properties of Polishing Pads on Oxide CMP (Chemical Mechanical Planarization
KSTLE International Journal - 직접입력, 2004

314

Investigation of laser shock wave cleaning with different particle condition
Journal of KSLP - 직접입력, 2003

315

불화유기막막에 의한 마이크로몰드의 표면개질
Materials Research Society of Korea Proceedings - 직접입력, 2002

316

Characterization of Fluorocarbon Thin Films by Contact Angle Measurements and AFM/LFM
Journal of the Microelectronics & Packaging Society, 2000

317

The Characterization of FC Organic Films by the Measurements of Contact Angles
J.of the Microelectronics and Packaging Society, 1999

318

The Characterization and Cleaning Efficiency of Surfactant Added NH₄OH Solutions
Korean J.of Material Research, 1999

319

The Effect of Surfactants in NH₄OH on Silicon Surfaces and Particle Removal
Material Research Society of Korea, 1997

320

The Solbility of Ozone in Deionized Water and its Cleaning Efficiency
Korean J.of Material Research, 1997