발행물

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특허
저서
컨퍼런스

전체 논문

323

321

Prefluorinated Organic Films for the Prevention of Stiction in MEMS
Proceedings of MEMS Researchers Association under the Korean, 1997

322

A Study of Interaction between Slurry Particles and Wafer Surfaces in CMP Process
Material Research Society of Korea, 1997

323

The Effect of the Hydrophobicity of Silicon Surface on the Formation
박진구
Materials Research Society, 1996