발행물
컨퍼런스
TACT 2019
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Atomic layer deposition of p-type Tin monoxide using Sn(dmamb)2
ICAE 2019
Comparative study of thermal and plasma-enhanced MgO ALD using Mg(EtCp)2 precursor
ISIMP 2019
Atomic layer deposition of p-type lithium-doped tin monoxide using Sn(dmamp)2, Li(btsa) and H2O
The effect of post deposition annealing on the properties of SrRuO3 thin films deposited by RF magnetron sputtering
대한화학회
Improved catalyst performance by SnOx overcoating using powder atomic layer deposition