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Atomic Layer Deposition of SrTiO3 Thin Films at a High Temperature (370oC)

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Atomic layer deposition of ruthenium and ruthenium dioxide thin films using RuO4 precursor for the DRAM capacitor electrode

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Enhancement of the Electrical Properties of SrTiO3 Thin Films Grown by Atomic Layer Deposition

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Fabrication and Characterization of High-k Gd2O3 MIM Capacitors Using ITO Thin Films as Bottom Electrode

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ALD of perovskite oxide and electrode thin films for memory device applications