,

SrTiO3 Thin Films with Highly Enhanced Atomic Layer Deposition Rate for Ultrahigh Density Capacitors

,

Development of an ALD-like SrRuxOy Low Temperature Process

,

Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition

,

Characterization of ALD Al-doped TiO2 films on ultrathin Ru buffered TiN layer for application to sub-30 nm DRAM capacitor

,

Pulsed chemical vapor deposition of RuO2 films and electrical performance of ALD TiO2 film on the RuO2 electrode