,

atomic layer deposition of phase-pure 2-D SnS thin films at low temperatures

,

Properties of p-type SnO Thin film grown by atomic layer deposition using Sn(dmamb)2 and H2O

,

Growth behavior and films properties of atomic-layer-deposited MgO Thin film using Mg(EtCp)2 precursor and H2O

,

Comparative study on the growth characteristics and film properties of PEALD SnO2 thin films using different plasma gases

,

Low-temperature Growth of 2-D SnS Thin Films by Atomic Layer Deposition