발행물
컨퍼런스
제19회 반도체학술대회
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Atomic Layer Deposition of SrTiO3 Films with Cp-based Precursors
Growth of conductive SrRuOx films by combined CVD/ALD process
42nd IEEE Semiconductor Interface Specialists Conference
Cross-bar resistive memory using TiO2 thin film
1st International Workshop on Resistive RAM
Deposition behavior of RuO2 electrodes using pulsed CVD for MIM capacitor of ReRAM/DRAM device
EuroCVD 18
Deposition of Ru based electrodes using CVD/ALD for MIM capacitor of next generation DRAM device