발행물

전체 논문

245

211

Mode transition of power dissipation induced by driving frequency in capacitive coupled plasma
정진욱, 0, 0, 0, 0
JOURNAL OF APPLIED PHYSICS, 200312

212

Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma
10091406
Journal of applied physics - 직접입력, 200312

213

Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges
정진욱, 0, 0, 0
THIN SOLID FILMS, 200307

214

On electron heating mechanism in Low pressure high density inductively coupled plasma(ICP)
정진욱
2003 IEEE Conference record, 200306

215

Theoretical investigation of the evolution of electron energy distribution fucntions in ICP
10091406
Thin Solid Films, 200305

216

electron temperature and density profile measurements during ion cyclotron resoance heating of Hanbit magnetic mirror device
정진욱, 0, 0, 0, 0, 0, 0
FUSION SCIENCE AND TECHNOLOGY, 200301

217

Electron temperaturre adn density profile mesurements during ICRH of Hanbit magnetic mirror device
10091406
Fusion science and Technology, 200301

218

On inductively coupled plasmas for next-generation processing
10091406
Surface and Coating technology, 200301

219

An inductive coupled plasma source for the next-generation processing
정진욱
The 2nd China-Korea Symposium on Semiconductor and IT, 200210

220

The Electron Cyclotron Resonance in radio frequency inductive discharge
10091406
Physical Review Letters, 200201