Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas
10091406
APPLIED PHYSICS LETTERS - 직접입력, 200812
232
Observation of the inductive to helicon mode transition in a weakly magnetized solenoidal inductive discharge
10091406
APPLIED PHYSICS LETTERS - 직접입력, 200810
233
Spectroscopic Measurement of the Electron Temperature and the Metastable Densities by Using a Simple Colisional-Radiative Model in a Low-Pressure Inductively-Coupled Argon Plasma
10091406
Journal of the Korean Physical Society - 등재, 200806
234
Characterization of a side-type ferrite inductively coupled plasma source for large scale processing
10091406
PLASMA SOURCES SCIENCE AND TECHNOLOGY - 직접입력, 200801
235
New Method to Measure the Electron Temperature and the Plasma Density in a Single-Frequency Capacitive Discharge
10091406
Journal of the Korean Physical Society - 등재, 200711
236
Plasma characteristics in a solenoidal inductive/capacitive discharge under a weak dc magnetic field
10091406
PHYSICS OF PLASMAS - 직접입력, 200710
237
Noninvasive method to measure the ion flux in capacitive discharge
10091406
APPLIED PHYSICS LETTERS - 직접입력, 200710
238
Etching characteristics of photoresist and low-k dielectrics by Ar/O2 ferrite-core inductively coupled plasmas
10091406
Microelectronic Engineering - 직접입력, 200706
239
On the hysteresis in E to H and H to E transitions and the multistep ionization in inductively coupled plasma
한양대학교, 10091406
APPLIED PHYSICS LETTERS - 직접입력, 200705
240
Floating probe for electron temperature and ion density measurement