A harmonic method for measuring electron temperature and ion density using an asymmetric double probe

Ion energy distribution measurement device using a capillary plate with high-aspect ratio

Investigation of contamination particles generation and surface chemical reactions on Al2O3, Y2O3, and YF3 coatings in F-based plasma

Series resonance effects of a variable inductor termination on the nonpowered electrode in capacitively coupled plasmas

High-speed plasma diagnostics based on the floating harmonic method in inductively coupled plasma and pulsed plasma

Improvement of photoresist etching by impedance control of a bias electrode in an inductive discharge

A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current

Effect of parallel resonance on the electron energy distribution function in a 60 MHz capacitively coupled plasma

Electron-assisted PR etching in oxygen inductively coupled plasma via a low-energy electron beam

Highly efficient plasma generation in inductively coupled plasmas using a parallel capacitor