Non-invasive probe diagnostic method for electron temperature and ion current density in atmospheric pressure plasma jet source

Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma

Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma

Relatively high plasma density in low pressure inductive discharges

"Response to ""Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'"" [Phys. Plasmas 22, 044701 (2015)]"

Pulsed plasma measurement method using harmonic analysis

Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas

On uniform plasma generation for the large area plasma processing in intermediate pressures

E-H heating mode transition in inductive discharges with different antenna sizes