Effect of electron energy distributions on the electron density in nitrogen inductively coupled plasmas

Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasma

Experimental investigation on the hysteresis in low-pressure inductively coupled neon discharge

Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual-frequency capacitively coupled argon plasma

Correlation of SiO2 etch rate in CF4 plasma with electrical circuit parameter obtained from VI probe in inductively coupled plasma etcher

Enhanced plasma generation in capacitively coupled plasma using a parallel inductor

Measurement of the electron energy distribution functions in low density RF plasmas through a tunable external RF filter

Low-energy electron beam generation in inductively coupled plasma via a DC biased grid

Plasma and electrical characteristics depending on an antenna position in an inductively coupled plasma with a passive resonant antenna

Effect of RF bias power on discharge mode transition and its hysteresis in inductively coupled plasmas