Hysteresis and current reduction during E-H mode transition in an inductively coupled plasma

Nonlinear circuit analysis of intermodulation currents in a floating Langmuir probe with a capacitive load

Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas

On the E to H mode transition in a dual frequency (2 and 13.56MHz) inductively coupled plasma

Improvement of Plasma Resistance of Anodic Aluminum-Oxide Film in Sulfuric Acid Containing Cerium(IV) Ion

Measurement of the electron energy distribution function in CO2 inductively coupled plasma

Experimental comparative analysis on series and parallel antenna in an inductively coupled plasma

High efficient plasma generation in an inductively coupled plasma using a passive resonant antenna

Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasma

Experimental investigation on the spatial distribution of floating potential at the wafer-level in inductively coupled oxygen plasma