Ultrathin gutter layer for high-performance thin-film composite membranes for CO2 separation

A monitoring device made of an anodic aluminum oxide template for plasma-induced charging potential measurements in the high-aspect-ratio trench structure

Transient voltage analysis on a series capacitor of the floating probe for plasma diagnostics

Compensation of the sheath effects in cylindrical floating probes

Evolution of two-dimensional plasma parameters in the plane of the wafer during the E- to H- and H- to E-mode transition in an inductively coupled plasma

Noninvasive electrical plasma monitoring method using reactor substrates as alternative current-sensing electrodes

Experimental investigation of edge-to-center density ratio in E-H mode transition of an inductively coupled plasma

Improved numerical AC superposition method for electron energy distribution functions

Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma

Time-resolved spatial distribution measurements of pulse-modulated argon plasmas in an inductively coupled plasma reactor