Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting

Electron heating and control of electron energy distribution for the enhancement of the plasma ashing processing

Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas

Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

Thermal Compression Chip Interconnection Using Organic Solderability Preservative Etched Substrate by Plasma Processing

Power dependence of electron density at various pressures in inductively coupled plasmas

Control of electron energy distribution by adding a pulse inductive field in capacitive discharge

Investigation of plasma diagnostics using a dual frequency harmonic technique

Study on Plasma Uniformity Using 2-D Measurement Method in Argon Inductively Coupled Plasmas

Enhanced Plasma Uniformity in RF Plasma With Side Multihole