Heating mode transition in a capacitive mode in inductively coupled plasma

Power dissipation mode transition by a magnetic field

반도체 공정용 플라즈마원

Pressure and Helium mixing effects on plasma parameters in temperature control using a grid system

The electron bounce resonance in a low pressure inductively coupled plasma

The finite size effect in a planar Inductively Coupled Plasma

Nonlocal electron kinetics in a planar inductive helium discharge

Review of heating mechanism in a inductively coupled plasma (ICP),

, The nonlocal and local property of the electron energy distribution function in a low pressure inductively coupled plasma

The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma