Effect of Growth Temperature during the Atomic Layer Deposition of the SrTiO3 Seed Layer on the Properties of RuO2/SrTiO3/Ru Capacitors for Dynamic Random Access Memory Applications
Kim, SH (Kim, Sang Hyeon), Lee, W (Lee, Woongkyu), An, CH (An, Cheol Hyun), Kwon, DS (Kwon, Dae Seon), Kim, DG (Kim, Dong-Gun), Cha, SH (Cha, Soon Hyung), Cho, ST (Cho, Seong Tak), Hwang, CS (Hwang, Cheol Seong)
ACS APPLIED MATERIALS INTERFACES, 2018