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전체 논문

115

81

Evaluating the top electrode material for achieving an equivalent oxide thickness smaller than 0.4 nm from an Al-doped TiO2 film
Woojin Jeon, Sijung Yoo, Hyo Kyeom Kim, Woongkyu Lee, Cheol Hyun An, Min Jung Chung, Cheol Jin Cho, Seong Keun Kim, Cheol Seong Hwang
ACS Appl. Mater. Interfaces, 2014

82

Chemistry of active oxygen in RuOx and its influence on the atomic layer deposition of TiO2 films
Woojin Jeon, Woongkyu Lee, Yeon Woo Yoo, Cheol Hyun An, Jeong Hwan Han, Seong Keun Kim, Cheol Seong Hwang
J. Mater. Chem. C, 2014

83

Study on the degradation mechanism of the ferroelectric properties of thin Hf0.5Zr0.5O2 films on TiN and Ir electrodes
Min Hyuk Park, Han Joon Kim, Yu Jin Kim, Woongkyu Lee, Taehwan Moon, Keum Do Kim, Cheol Seong Hwang
Appl. Phys. Lett., 2014

84

Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials
Lee, SW, Choi, BJ, Eom, T, Han, JH, Kim, SK, Song, SJ, Lee, W, Hwang, CS
COORDINATION CHEMISTRY REVIEWS, 2013

85

Evolution of phases and ferroelectric properties of thin Hf 0.5Zr0.5O2 films according to the thickness and annealing temperature
Min Hyuk Park, Han Joon Kim, Yu Jin Kim, Woongkyu Lee, Taehwan Moon, Cheol Seong Hwang
Applied Physics Letters, 2013

86

Effect of forming gas annealing on the ferroelectric properties of Hf 0.5Zr0.5O2 thin films with and without Pt electrodes
Min Hyuk Park, Han Joon Kim, Yu Jin Kim, Woongkyu Lee, Hyo Kyeom Kim, Cheol Seong Hwang
Applied Physics Letters, 2013

87

Atomic layer deposition of SrTiO3 films with cyclopentadienyl-based precursors for metal-insulator-metal capacitors
Woongkyu Lee, Jeong Hwan Han, Woojin Jeon, Yeon Woo Yoo, Sang Woon Lee, Seong Keun Kim, Chang-Hee Ko, Clement Lansalot-Matras, Cheol Seong Hwang
Chemistry of Materials, 2013

88

Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature
Min Hyuk Park, Han Joon Kim, Yu Jin Kim, Woongkyu Lee, Taehwan Moon, Cheol Seong Hwang
Appl. Phys. Lett., 2013

89

Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials
Sang Woon Lee, Byung Joon Choi, Taeyong Eom, Jeong Hwan Han, Seong Keun Kim, Seul Ji Song, Woongkyu Lee, Cheol Seong Hwang
Coord. Chem. Rev., 2013

90

Effect of forming gas annealing on the ferroelectric properties of Hf0.5Zr0.5O2 thin films with and without Pt electrodes
Min Hyuk Park, Han Joon Kim, Yu Jin Kim, Woongkyu Lee, Hyo Kyeom Kim, Cheol Seong Hwang
Appl. Phys. Lett., 2013