Conformal Formation of (GeTe2)((1-x))(Sb2Te3)(x) Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
Eom, T (Eom, Taeyong), Choi, S (Choi, Seol), Choi, BJ (Choi, Byung Joon), Lee, MH (Lee, Min Hwan), Gwon, T (Gwon, Taehong), Rha, SH (Rha, Sang Ho), Lee, W (Lee, Woongkyu), Kim, MS (Kim, Moo-Sung), Xiao, MC (Xiao, Manchao), Buchanan, I (Buchanan, Iain), Cho, DY (Cho, Deok-Yong), Hwang, CS (Hwang, Cheol Seong)
CHEMISTRY OF MATERIALS, 2012