발행물

논문
특허
저서
컨퍼런스

전체 논문

174

141

Slurry Components in Metal Chemical Mechanical Planarization (CMP) Process: Review
Lee, H (Lee, Hyunseop), Jeong, H (Jeong, Haedo), Lee, D (Lee, Dasol)
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2016

142

Mathematical modeling of material removal rate in roll-type linear CMP (roll-CMP) process: Effect of polishing pad
Lee, H (Lee, Hyunseop)
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2016

143

Mechanical aspects of the chemical mechanical polishing process: A review
Lee, H (Lee, Hyunseop), Jeong, H (Jeong, Haedo), Lee, D (Lee, Dasol)
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2016

144

냉각수 유량에 따른 양면 랩그라인딩 정반의 전열특성
이현섭, 김동균, 김종윤
한국윤활학회지, 2016

145

The effects of a spray nozzle on copper CMP for reduction in slurry consumption
이현섭, 이다솔, 정해도
Journal of Mechanical Science and Technology, 2015

146

Development of Green CMP by Slurry Reduction through Controlling Platen Coolant Temperature
이현섭, 유민종, 장수천, 김형재, 정해도
International Journal of Precision Engineering and Manufacturing-Green Technology, 2015

147

Signal Analysis of CMP Process based on AE Monitoring System
Park, SJ (Park, Sun-Joon), Lee, HS (Lee, Hyun-Seop), Jeong, H (Jeong, Haedo)
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY, 2015

148

CMP 공정중 박막 종류에 따른 AE 신호 분석
정해도, 박선준, 이현섭
대한기계학회논문집 A, 2014

149

Preliminary Study on the Effect of Spray Slurry Nozzle in CMP for Environmental Sustainability
Lee, H, Park, Y, Lee, S, Jeong, H
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2014

150

선형 Roll-CMP에서 공정변수에 관한 통계적 분석
왕함, 이현섭, 정해도
한국윤활학회지, 2014