,

Distribution of Plasma Parameters at Wafer Level Measured by 2D Plasma Parameter Diagnostic Method in Inductively Coupled Plasmas

,

In-Situ Measurement Method of Dielectric-Film Thickness for Processing

,

A Study on the Enlargement of the Plasma Reactor using a Global Model

,

A comparative study on the floating harmonic method using dual frequency in an inductive discharge

,

Thermo-Compression Flipchip Interconnection using Plasma Enhanced Copper Organic Solderability Preservative Etched Substrate