,

평판형 탐침을 이용한 공정 챔버 벽 증착 막 두께 측정

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저밀도 유도 결합 플라즈마에서 전자 에너지 분포 측정

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Spatial plasma potentials and electron energy distributions in inductively and capacitively coupled plasmas under a weakly collisional and nonlocal electron kinetic regime

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Experimental measurement of plasma parameters and electron energy distribution in ferrite-core side type Ar/He inductively coupled plasma

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Transmission characteristics of the wave cut-off probe with parallel plates