발행물
컨퍼런스
67th Annual Gaseous Electronics Conference
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Measurement of the surface charge accumulation using anodic aluminum ox-ide(AAO) structure in an inductively coupled plasma
In-situ measurement method of sheath capacitance in plasmas
Transition of Plasma Electrons from Anisotropy to Isotropy at Beginning of the Pulsed Discharges
E-H transition and Hysteresis in Radio-Frequency Inductively Coupled Plasmas
5th International Conference Microelectronics and Plasm Technology
Plasma density dynamics during gas on/off