,

On harmonic diagnostic method using two frequencies in a floating Langmuir probe

,

Tunable external RF choke filter design for single Langmuir probe in RF discharges

,

Experimental investigation of plasma parameter profiles on wafer level with dis-charge gap lengths in an inductively coupled plasma

,

Study on self-bias effect in floating probe using dual frequency

,

The effect of RF plasma fluctuation on floating harmonic probes