,

A fast method for obtaining electron energy distribution function by using Savitzky Golay technique

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저밀도 플라즈마 진단을 위한 단일 랑뮤어 탐침법에서 외장필터개선에 관한 연구

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Study on CO2 decomposition in CO2 and Ar mixing gas inductively coupled plasma

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Spatial distribution of floating potential at wafer level in electronegative plasma

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Multi-Layer deposition process control using impedence feedback system for 3D device fabrication