발행물
컨퍼런스
7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Study of the numerical differentiation to obtain the electron distribution fun etions of the plasmas
67th Annual Gaseous Electronics Conference
Hysteresis in Radio-Frequency Inductively Coupled Plasmas
Experimental observation of transit time resonance heating through electron energy distribution function measurement in a low pressure inductively coupled plasma
Analysis of the harmonic currents in floating probes with dielectric films
Investigation of power dependence of electron density for various pressures