발행물
컨퍼런스
69th Annual Gaseous Electronics Conference
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Effect of dual frequency rf power in an inductively coupled plasma
On the optimal chamber length and electron heating mechanism in low pressure inductive discharges
Time-resolved probe measurement in pulsed plasma using advanced boxcar technique
High time-resolution spatial distribution measurement of the ion flux and the electron temperature in an inductively coupled plasma
Measurement of dielectric-film thickness at low densityplasma