발행물
컨퍼런스
68th Annual Gaseous Electronics Conference
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Experimental investigation on collisionless electron heating mechanism through electron energy probability function measurement in a low pressure inductively coupled plasmas
Spatial distribution of floating potiential at wafer level in inductively coupled plasmas
Improved tunable external filter for Langmuir probe measurement at low density plasmas
Two-dimensional time-resolved measurement of plasma parameters on a wafer-level using floating harmonic method
7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
High-Speed RF/Plasma Diagnostic and Control Technology in Plasma Enhanced Atomic Layer Deposition (PEALD) Process