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Investigation of the ow rate eect on the plasma parameters by using miniaturized plasma diagnostic device in the remote plasma.

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Measurement of ion energy distributions using a capillary plate with a high-aspect ratio

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Experimental investigation on the E to H transition in a dual frequency inductively coupled plasma (2MHz/13.56MHz)

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Plasma diagnostic method by using charged capacitor voltage

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Noninvasive measurement of plasma parameters via the reactor substrates