,

The effect of a remote plasma generator on a direct inductively coupled plasma

,

Comparison of power transfer eciency and plasma parameters of series and parallel antennas in inductively coupled plasmas

,

Experimental investigation of rf bias power on the plasma density and electron heating in an inductively coupled plasma

,

Electron energy distribution function measurement in a CO2/Ar induc- tively coupled plasma

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Plasma characteristics in inductively abd capacitively coupled hybrid source using single RF power