발행물
컨퍼런스
4th ICMAP
,
Collisionless electron heating and control of electron energy distribution by adding pulsed inductive fields in capacitively coupled plasma
A study on the correlations between external discharge parameters and plasma characteristics in an inductively coupled plasma using transformer circuit model
A new method for measuring transferred power to plasma in inductive discharge
Spatial characteristics of plasma parameters in a weak dc magnetic field in solenoidal inductive discharge
"4th ICMAP
Characteristics of electron cyclotron resonance in magnetized solenoid type inductively coupled plasmas