,

numerical calculation of spatial electric field by rf bias in high density plasmas

,

spatial evolutions of the electron distributions in a weakly magnetized solenoidal-type inductively coupled plasma

,

Studies on the spatial and temporal behaviors of the elctron energy distribution and plasma parameters in inductively and/or capacitively coupled plasma

,

Study on plasma uniformity by using 2D real time measurement method in Ar/He inductively coupled plasmas

,

Real-time observation of capacitance of surface material during plasma operation