,

전력 공급 방식에 따른 유도 결합 플라즈마 특성 변화 연구

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이중주파수 부유형 탐침법을 이용한 플라즈마 진단 연구

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Electrical characteristics and mode transition of power dissipation in an asymetric capacitively coupled plasma

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Measurement of the plasma density and electron temperature uniformities in inductively coupled using 2D real time measurement method

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The effect of collision frequency on the electric field distribution in a high frequency capacitive discharge