,

Effect of thickness and sidewall slope of photoresist mask on etch profile of copper interconnect

,

Etch characteristics of cobalt thin films in high density plasma of Cl2/O2/Ar gas mixture

,

Correlation between mask slope and redeposition in Cu dry etching

,

Nanometer-Scale Etching of Cobalt Thin Films Using High Density Plasma of Acetone/Ar

,

Effect of mask thickness on redeposition in etch profile of Cu dry etching