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NANO KOREA 2021 The 19th International Sanotech Symposium & Exhibition
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Effect of organic gas mixture on Etching of Nanometer-Scale Patterned Cu Thin Film Using Pulsed Modulated Plasma
2021 Materials Research Society Meeting & Exhibit
Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Scale Patterned Copper thin films using Organic Materials
2021 Materials Research Society Spring Meeting & Exhibit
Effect of Non-Corrosive Gas Mixture on Etching of Nanometer-Scale Patterned Cu Thin Film Using Pulsed Modulated RF Source Plasma
제28회 한국반도체학술대회
Dry Etching of Nanometer-Scale Patterned Copper Thin Films Using Inductively Coupled Plasma of Organic Materials
High Density Plasma Etching of Copper Thin Films in a Piperidine/O2/Ar Plasma